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Surface Technologies and CMP

Surface Technologies manufactures a wide range of aluminum, cerium and zirconium oxides. These products are used to surface finish ceramic, glass, metal and plastic substrates. The CMP products find application in planarizing various levels of semiconductor chips at the STI (Shallow Trench Isolation) and ILD (Inner Layer Dielectric) levels.

The metal oxides produced are supplied as powders and preformulated compositions to meet specific customer requirements. Compositions can be prepared in either dry, aqueous or non-aqueous vehicle systems. Our customers can choose from a series of products with purity levels ranging from 99.99% to commercial grade materials. These materials can be specifically tailored to meet particle size, density and surface area specifications.