POST CMP CLEANERS 

Ferro is a leading global manufacturer of optimized high-purity CMP cleaners designed to deliver optimal performance in post copper cleans for metal CMP (chemical mechanical planarization) applications.

Post CMP Cleaners-Post Copper Cleaner and Post Cobalt Cleaner

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GC14200 POST COPPER CLEANER
The GC14200 series is a line of advanced cleaners for post copper CMP processes that combines excellent cleaning performance with maximum copper surface protection. 
ADVANTAGES
  • Free of surfactants 
  • Free of TMAH
  • Excellent cleaning performance/efficiency 
  • Excellent Cu surface protection 
  • Good organic/particle residue removal 
  • Highly concentration ratio/wide for POU
  • GC14200 is highly dilutable and offers a very broad POU dilution range

GC14200 CLEANING PERFORMANCE 

CRITERIA  GC142000 
ROUGHNESS (Å)  ~6 
DER (Å)  ~15.5 
DEFECT COUNTS (BW’S)   0.22
BTA RESIDUE (CU/BTA NORMALIZED  LOW 
COPPER RECESS (Å)  10 - 40
CORROSION RATE (MMPY)  0.092 

Post CMP cleaner dilution graph
GC14210 POST COBALT CLEANER
GC14210 was designed for exceptionally low galvanic corrosion (DE Co-Cu) and is used in applications such as advanced semiconductor nodes where cobalt is used as the via interconnect. 

With safety and performance in mind, GC 14200 contains no TMAH. It is also highly dilutable and offers a very broad POU dilution range. 
We also work with our customers to design custom products with tailored properties required for a specific application. 
CMP SLURRIES FOR POST COPPER CLEANS PRODUCT INFORMATION

Ferro Post CMP Cleaner Product Data


ELECTRONIC MATERIALS VALUE ADDED SERVICES

VALUE ADDED SERVICES
With over 40 years of surface finishing experience, Ferro’s research, development and analytical resources enable us to develop unique polishes and abrasives for polishing a variety of substrates including plastic, glass, automotive clear coats, and sapphire.

Our expertise in abrasive particle development and manufacturing technology allows us to optimize the physical and chemical properties needed to deliver optimal solutions for our customers’ varied polishing applications.